http://www.freshpatents.com/Electric-resistance-heating-devices-dtnewntc392.php USPTO Class 392 - Electric resistance heating devices en-us Thu, 24 Jul 2008 15:04:49 -0700 1000 Wednesday Thursday Friday Saturday Sunday 141 31 http://www.freshpatents.com/index.php?rss=true http://www.freshpatents.com/images/freshpatentsnav_rss.gif http://www.freshpatents.com/Temperature-measurement-and-control-of-wafer-support-in-thermal-processing-chamber-dt20080717ptan20080170842.php Thu, 24 Jul 2008 15:04:49 -0700 The present invention provides apparatus and methods for achieving uniform heating to a substrate during a rapid thermal process. More particularly, the present invention provides apparatus and methods for controlling the temperature of an edge ring supporting a substrate during a rapid thermal process to improve temperature uniformity across the...