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  		<title>Substrate temperature accuracy and temperature control flexibility in a molecular beam epitaxy system</title> 
  		<link>http://www.freshpatents.com/-dt20120202ptan20120024222.php</link> 
  		<pubDate>Mon,  6 Feb 2012 13:28:31 -0800</pubDate> 
  		<description>A control system and method for controlling temperatures while performing a MBE deposition process, wherein the control system comprises a MBE growth structure; a heater adapted to provide heat for the MBE deposition process on the MBE growth structure; and a control computer adapted to receive a plurality of dynamic...</description> 
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  		<title>Thin films and methods of making them using cyclohexasilane</title> 
  		<link>http://www.freshpatents.com/-dt20120202ptan20120024223.php</link> 
  		<pubDate>Mon,  6 Feb 2012 13:28:31 -0800</pubDate> 
  		<description>Cyclohexasilane is used in chemical vapor deposition methods to deposit epitaxial silicon-containing films over substrates. Such methods are useful in semiconductor manufacturing to provide a variety of advantages, including uniform deposition over heterogeneous surfaces, high deposition rates, and higher manufacturing productivity. Furthermore, the crystalline Si may be in situ doped...</description> 
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